光學相干斷層掃描(Optical Coherence Tomography, OCT)是一種非接觸、非侵入式的高解析度影像量測技術,主要利用低相干光源的干涉原理,來取得樣品內部結構的橫向或縱向斷層影像。
OCT技術可達到微米等級的解析度,並具備高速掃描能力,廣泛應用於精密工程領域的材料檢測與品質控制與眼科、皮膚科、心血管醫學生醫產業的運用。
OCT系統透過分光干涉儀將光束分成參考光與樣品光,兩者在偵測端重新結合後產生干涉訊號,進一步分析可重建樣品的內部結構。與傳統影像技術相比,OCT具備非接觸性、成像深度高、對比明確、不需染劑等優點,是當前精密量測與生醫影像中的關鍵技術之一。
Optical Coherence Tomography (OCT) is a non-contact, non-invasive, high-resolution imaging and measurement technique that uses the principle of low-coherence light interference to obtain cross-sectional images of internal structures within a sample, either laterally or axially.
OCT technology can achieve micron-level resolution and supports high-speed scanning, making it widely applicable in precision engineering for material inspection and quality control, as well as in biomedical fields such as ophthalmology, dermatology, and cardiovascular medicine.
An OCT system utilizes an interferometer to split a light beam into a reference arm and a sample arm. These beams are recombined at the detector to generate interference signals, which are analyzed to reconstruct the internal structure of the sample. Compared to traditional imaging methods, OCT offers advantages such as non-contact operation, deeper imaging penetration, high contrast, and no need for contrast agents, making it one of the key technologies in precision measurement and biomedical imaging today.
光學密度掃描(Optical Density, OD)是一種專門用在量測1um以下厚度的超薄鍍膜技術,利用超高穩定度的光學量測系統,推算材料的的吸收係數以及吸收厚度,為非接觸、非侵入式的影像解析技術。
OD光學密度掃描技術,是少數可以達到奈米等級解析度的薄膜厚度量測方式,非常適合應用於半導體薄膜製程或光學元件精密鍍膜領域,以及超薄光阻的品質檢測與製程控制...等運用,是當前精密量測的關鍵技術之一。
Optical Density (OD) scanning is a specialized technique used to measure ultra-thin films with thicknesses below 1 μm. It employs a highly stable optical measurement system to estimate a material’s absorption coefficient and absorption thickness. This method is non-contact and non-invasive, making it suitable for high-resolution imaging analysis.
OD optical density scanning is one of the few techniques capable of achieving nanometer-level resolution in thin film thickness measurement. It is particularly well-suited for applications in semiconductor thin-film processing, precision optical coatings, and quality inspection and process control of ultra-thin photoresists. As such, it is considered one of the key technologies in modern precision metrology.